Heater Module

Design heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The immediate hot zone holding the element is constructed from refractory metals such as Molybdenum, Tantalum and ceramics and does not include any other materials to compromise performance at high temperature. These modules are therefore particularly suitable for ultra-high vacuum applications. 

Key Features:

• High uniformity heating to 1200°C

• Refractory metal hot zone – uncompromised performance at high temperatures

• Elements with large radiating surface to gap ratio – able to run at lower temperatures than conventional metal heaters.